发明名称 |
Sputter cathode |
摘要 |
The target (5) of a sputter cathode 3 is permanently bonded to a metallic backing plate (14, 15) with a coefficient of thermal expansion similar to that of the target (5). This backing plate (14, 15) is held removably on the electrode (4), for example by means of spring clips (16, 17).
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申请公布号 |
US5531876(A) |
申请公布日期 |
1996.07.02 |
申请号 |
US19950392709 |
申请日期 |
1995.02.23 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
SAUNDERS, MARK;OCKER, BERTHOLD |
分类号 |
C23C14/08;C23C14/34;H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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