发明名称 |
ULTRAPURE WATER PRODUCTION APPARATUS |
摘要 |
Provided is an ultrapure water production apparatus capable of producing high-quality ultrapure water from which microparticles have been removed at a high level. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water, the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group. |
申请公布号 |
US2016220958(A1) |
申请公布日期 |
2016.08.04 |
申请号 |
US201415021178 |
申请日期 |
2014.09.30 |
申请人 |
KURITA WATER INDUSTRIES LTD. |
发明人 |
FUKUI Takeo;MORITA Hiroshi;TANAKA Yoichi;IINO Hideaki;YAMADA Satoshi |
分类号 |
B01D61/58;B01D61/02;C02F1/44;B01D61/14 |
主分类号 |
B01D61/58 |
代理机构 |
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代理人 |
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主权项 |
1. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water,
the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group. |
地址 |
Tokyo JP |