发明名称 ULTRAPURE WATER PRODUCTION APPARATUS
摘要 Provided is an ultrapure water production apparatus capable of producing high-quality ultrapure water from which microparticles have been removed at a high level. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water, the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group.
申请公布号 US2016220958(A1) 申请公布日期 2016.08.04
申请号 US201415021178 申请日期 2014.09.30
申请人 KURITA WATER INDUSTRIES LTD. 发明人 FUKUI Takeo;MORITA Hiroshi;TANAKA Yoichi;IINO Hideaki;YAMADA Satoshi
分类号 B01D61/58;B01D61/02;C02F1/44;B01D61/14 主分类号 B01D61/58
代理机构 代理人
主权项 1. An ultrapure water production apparatus comprising a subsystem that produces ultrapure water from primary pure water, the subsystem including a membrane unit disposed at the end of the subsystem, wherein the membrane unit is constituted by a plurality of membrane devices arranged in series, the first of the membrane devices being a UF membrane device, an MF membrane device, or an RO membrane device, the last of the membrane devices being a UF membrane device or an MF membrane that is not modified with an ion-exchange group.
地址 Tokyo JP