发明名称 |
SEMICONDUCTOR MANUFACTURING APPARATUS |
摘要 |
The spin-on glass coating system includes a motor for rotating a plate which holds a wafer, a housing which contains the plate, a SOG material insertion unit for applying a SOG material on the wafer by inserting the material on the rotating wafer, and a thermal energy supplying unit for providing thermal energy on the edge of the wafer, thereby improving the manufacturing process.
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申请公布号 |
KR960008553(B1) |
申请公布日期 |
1996.06.28 |
申请号 |
KR19930006347 |
申请日期 |
1993.04.15 |
申请人 |
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PARK, MIN;KOO, JIN - KEUN |
分类号 |
H01L21/31;B05C11/08;H01L21/027;H01L21/28;H01L21/316;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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