CONTACT PLUG MANUFACTURING METHOD USING TUNGSTEN

摘要

The contact plug manufacturing method using tungsten comprises the steps of formating a via contact hole for exposing a first metal layer by etching a barrier layer on the first metal layer, formating a tungsten plug for filling the via contact hole by depositing tungsten after implanting the Si into the bottom part of the via hole, and contacting the first metal layer through the tungsten plug, thereby reducing a contact resistivity.