VAPOR DRYER OF WAFER,申请号KR19930004137U-传众专利搜索

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发明名称	VAPOR DRYER OF WAFER
摘要
申请公布号	KR960005378(Y1)	申请公布日期	1996.06.28
申请号	KR19930004137U	申请日期	1993.03.19
申请人	LG SEMICONDUCTOR CO., LTD.	发明人	PARK, JOO - HYUNG;KWAK, MYUNG - SOO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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