Method of manufacturing display device and forming an alignment mark having concave and convex portions formed along a first pattern

摘要

A method of manufacturing a display device is disclosed. In one aspect, the method includes forming an active layer over a substrate, forming a first insulating layer over the active layer, forming a gate electrode over the active layer, and forming an alignment mark over the substrate. The forming of the alignment mark includes forming a first layer including a first pattern and forming a second layer over the first layer and including concave and convex portions formed along the first pattern. The first insulating layer is interposed between the first and second layers.

主权项

1. A method of manufacturing a display device, the method comprising:
forming an active layer over a substrate; forming a first insulating layer over the active layer; forming a gate electrode over the active layer; and forming an alignment mark over the substrate, wherein the forming of the alignment mark comprises:
forming a first layer including a first pattern; andforming a second layer over the first layer and including concave and convex portions formed along the first pattern.