| 摘要 |
FIELD: electron-beam technology; melting; welding, evaporating, and other plants whose process chamber is provided with evacuation system. SUBSTANCE: plant has evacuated process chamber and electron gun both separated by hole for conveying electron beam, and also working gas admission system. Novelty in plant is that exit device of working gas admission system (hole, nozzle, rack, etc.) is located on gun side in space at electron beam transport hole; working gas pressure in this space is minimum 2.5 times higher than that in process chamber and size of electron-beam transport hole meets K< 0,3 condition, where Kn is Knudsen number; working gas is light gas whose atomic mass is not over 30. EFFECT: improved reliability of plant, especially under peak gas separation condition and presence of chemically active gases and steams in process chamber. |
