| 摘要 |
An array (200) of M x N thin film actuated mirrors (201) includes an active matrix (210) having a substrate, an array of M x N connecting terminals (214) and an array of M x N transistors, and an array of M x N actuating structures (250). Each of the actuating structures (250) is of a bimorph structure and includes an actuating portion (180) and a light reflecting portion (190), the actuating portion (180) including a front portion of a second thin film electrode (245), a lower electrodisplacive member (285), an intermediate electrode (295), an upper electrodisplacive member (275), and a front portion of a first thin film electrode (235). The front portion of the second thin film electrode (245) is electrically connected to each of the connecting terminals (214) and each of the transistors, and the remaining portion of the first thin film electrode (235) is placed on top of the remaining portion of the second thin film electrode (245) to form the light reflecting portion (190) allowing the first and the second thin film electrodes to function as a signal electrode. The intermediate electrode (295) placed between the upper and the lower electrodisplacive members (275, 285) functions as a common bias electrode.
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