发明名称 |
SAMMENSÆTNING, PRÆGEBLÆK OG FREMGANGSMÅDE TIL PRÆGNING |
摘要 |
Disclosed is a silane-based composition for forming an imprinting ink for imprint lithography applications in which the crosslinking of the silanes in the composition is suppressed by the inclusion of a compound of Formula 3: wherein R9 is selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2. An ink may be formed by adding a PAG, photoinitiator or TAG to the composition such upon their activation, the crosslinking reaction is completed. An imprinting method using 10 such an ink is also disclosed. |
申请公布号 |
DK2904058(T3) |
申请公布日期 |
2016.08.22 |
申请号 |
DK20130824202T |
申请日期 |
2013.12.13 |
申请人 |
Koninklijke Philips N.V. |
发明人 |
VERSCHUUREN, Marcus Antonius;VAN BRAKEL, Remco |
分类号 |
C09D11/101;C09D11/102 |
主分类号 |
C09D11/101 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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