| 摘要 |
PURPOSE: To provide a gas laser apparatus capable of improving a maintenance work, and capable of meeting the need for the increase of the output. CONSTITUTION: A magnetron oscillator 5 is provided outside a sealed chamber 1 containing a laser gas, and a waveguide 6 connected to its output end is led up to the outside wall of the chamber 1. At its tip position, a chamber window 7 is provided. Besides, a resonance magnetic field generating coil 8 is provided outside the chamber 1 at a position where this chamber window 7 is provided. And laser oscillation is performed by a microwave led in from outside the chamber 1. |
