发明名称 |
Method of positioning elements of an optical integrated circuit |
摘要 |
The present invention provides a method of manufacturing an optical component, having the steps of forming a first position aligning pattern on a surface of a substrate, forming a second position aligning recess-projection pattern conforming with the first position aligning pattern and a third position aligning recess-projection pattern having a predetermined positional relationship with the second position aligning recess-projection pattern, and applying a predetermined processing with the third position aligning recess-projection pattern used as a reference under a predetermined positional relationship with the first position aligning pattern.
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申请公布号 |
US5529595(A) |
申请公布日期 |
1996.06.25 |
申请号 |
US19950441602 |
申请日期 |
1995.05.15 |
申请人 |
THE FURUKAWA ELECTRIC CO., LTD. |
发明人 |
UEKI, KEN;SHIMIZU, TAKEO;OHYAMA, ISAO;NAKAMURA, SHIRO;YANAGAWA, HISAHARU |
分类号 |
G02B6/13;(IPC1-7):C03B19/14 |
主分类号 |
G02B6/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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