| 摘要 |
PROBLEM TO BE SOLVED: To provide a fin type capacitor which can increase the capacitance and its manufacture. SOLUTION: This fin type capacitor is constituted, including the first electrode and the second electrode where the first substance layers 112a, 112b, and 112c constituted of conductive oxides and the second substance layers 114a and 114b constituted of conductors are stacked alternately and flanks of the second substances 114a and 114b are recessed inward to form the fin structure, and dielectric substance 18 which is made between the first electrode and the second electrode. |
