POWER SOURCE FOR HIGH FREQUENCY PLASMA GENERATING DEVICE,申请号JP19940311650-传众专利搜索

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发明名称	POWER SOURCE FOR HIGH FREQUENCY PLASMA GENERATING DEVICE
摘要
申请公布号	JPH08167500(A)	申请公布日期	1996.06.25
申请号	JP19940311650	申请日期	1994.12.15
申请人	JEOL LTD	发明人	ITO YOJI;KINDAICHI YOUZOU
分类号	H05H1/46;(IPC1-7):H05H1/46	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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