发明名称 |
Mechanically joined sputtering target and adapter therefor |
摘要 |
A target assembly in which the sputtering material is not soldered or otherwise metallurgically bonded to a backing plate. Rather, the target, which is homogeneously manufactured of sputtering material, is mechanically coupled (e.g., with bolts) to an adapter, which is itself permanently affixed to the chamber. As a result, the target can be easily uncoupled from the chamber and replaced, without also requiring removal and replacement of a backing plate.
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申请公布号 |
US5529673(A) |
申请公布日期 |
1996.06.25 |
申请号 |
US19950390662 |
申请日期 |
1995.02.17 |
申请人 |
SONY CORPORATION;MATERIALS RESEARCH CORPORATION |
发明人 |
STRAUSS, DAVID P.;HUNT, THOMAS J.;GILMAN, PAUL S. |
分类号 |
C23C14/34;H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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