发明名称 MANAGEMENT SYSTEM FOR MANUFACTURING DEVICE
摘要 PURPOSE: To more facilitate data management. CONSTITUTION: A data file capable of being accessed is distinguished by producing a data directory (.USER) in which plural manufacturing devices 2 to 6 connected to a data editing device through a network are classified into device groups 2, 3 and 4 to 6 capable of being controlled by the same data, and simultaneously, by generating the data directories (.NET) about each manufacturing device 2 to 6. Thus, even in the case where the wrong device is designated as the transferring destination of unusable data, it can not be transferred.
申请公布号 JPH08166994(A) 申请公布日期 1996.06.25
申请号 JP19940332970 申请日期 1994.12.14
申请人 NIKON CORP 发明人 MORIOKA TOSHINOBU;YOKOTA MUNEYASU
分类号 H01L21/027;B65G61/00;G05B19/418;G06Q50/00;G06Q50/04;H01L21/02 主分类号 H01L21/027
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