| 摘要 |
PURPOSE: To set the pitch of radiation detecting elements in an array radiation detector by securing a semiconductor wafer, on which electrodes are formed, to an underlying wafer and then dicing the semiconductor wafer into individual radiation detecting elements. CONSTITUTION: A CdTe wafer is formed with electrodes on the opposite sides thereof and then pasted onto an underlying silicon wafer for dicing through acetone soluble wax. The CdTe wafer is further coated, on the upper surface electrode side thereof, with methanol soluble wax before being diced into individual radiation detecting elements 1. Subsequently, the wax is dissolved with methanol only on the upper surface electrode side of the wafer thus exposing the upper surface electrode side. Ten radiation detecting elements 1 contiguous in the longitudinal direction are then bonded through an insulating adhesive, i.e., a silicone rubber 2. After the silicone rubber 2 is solidified, the acetone soluble wax is dissolved using acetone and an array of ten detection elements 1 is taken out and connected electrically to produce a one-dimensional radiation detector array.
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