发明名称 ALUMINA WIRING BOARD
摘要 PURPOSE: To prevent change of dielectric constant and stabilize electrostatic capacitance by incorporating a decoupling capacitor formed with inclusion of an alumina layer including, in the rate of the particular range, metal powder including W in the rage higher than the constant value for the total amount of Mo and W. CONSTITUTION: This wiring board incorporates a decoupling capacitor which is formed with inclusion of an alumina layer including 5 to 30wt.% of metal powder containing W in the rate of 30wt.% to the total amount of Mo and W. Thereby, diffusion of electrolytic layer 13 into dielectric material layer 12 is controlled and a specific dielectric constant of the dielectric material layer 12 is maintained to the constant value even when thickness of electrode layer 13, thickness of each dielectric material layer 12 and thickness of alumina insulating material layer are changed due to the change of conditions in the manufacturing process. Accordingly, the alumina wiring board comprising a decoupling capacitor having the constant electrostatic capacitance can be produced with good reproducibility.
申请公布号 JPH08167776(A) 申请公布日期 1996.06.25
申请号 JP19940308577 申请日期 1994.12.13
申请人 SUMITOMO METAL IND LTD 发明人 KATAURA HIDENORI;HASHIMOTO MASAYA
分类号 C04B35/111;H01L23/12;H01L23/14;H05K1/03;H05K3/46 主分类号 C04B35/111
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