| 摘要 |
<p>PURPOSE: To provide a sensor having a high flow rate measuring sensitivity by installing a sensor main body produced by laminating a heat radiating thin film and a thermistor thin film on the upper face of a substrate in the open part of a pipe through which a fluid flows in the way that the bottom face of the substrate can contact directly with the object fluid for measurement. CONSTITUTION: A sensor main body is produced by laminating a heat radiating thin film 32 and a thermistor thin film 33 on a substrate 31 via an insulating thin film 34, connecting an electrode 35 to be connected with a lead wire 36 with the thin films 32, 33, and covering the upper face with a protective layer 37. The substrate 31 is so installed as to make the bottom face of the substrate 31 almost blush with the inner plane of a tube. To strengthen the resistance to a fluid which flows in the tube, the bottom face of the substrate 31 is coated with a strengthening film by electroless coating method. When electricity is applied to the thin film 33 to heat the film, the heat is radiated to the fluid and the temperature near the thin film 32 becomes constant. The temperature of the fluid is measured by the thin film 33 and at the same time by another thermistor and the flow rate of the fluid can be calculated based on the temperature difference. In this case, since the bottom face of the substrate 31 is brought into direct constant with the fluid, the measurement sensitivity can be heightened.</p> |
