| 摘要 |
PURPOSE: To provide an x-ray generating apparatus which can be stably used for a long time, as a result, by lessening adhesion and deposition of undesirable scattered particles to and on a thin film for scattered particle shielding and a clean optical face without lowering the intensity (x-ray intensity in taking out direction) of x-ray to be taken out of an x-ray source. CONSTITUTION: An x-ray generating apparatus is an apparatus which generates plasma 103 by radiating excited energy beam 102 to a target member 101 in a pressure decreased vacuum container 100 and takes out x-ray 104 from the plasma 103. A scattered particle shielding member 105 to shield scattered particles 107 emitted out of the target member 101 and/or the plasma 103 is set near the target member 101 and the plasma 103 and an open part 106a through which the excited energy beam 102 passes and an open part 106b through which the x-ray 104 passes are separately formed in the scattered particle shielding member 105. |
