| 摘要 |
PURPOSE: To provide an aligner capable of accurately correcting the deviation of a material to be exposed in an upward direction or a downward direction. CONSTITUTION: For example, when the material to be exposed M moved in a state where it is interposed by a fixed guiding roller 114 and a nipper guiding roller 115 is deviated upward, the pressing force of an upper air cylinder 116U is made weak and the pressing force of a lower air cylinder 116L is made strong. As a result, in the rollers 114 and 115, the diameter (a) of an upper part where the pressing force is weak is larger than the diameter (b) of a lower part where the pressing force is strong because of the elastic deformation of elastic members 114a and 115a, and the circumferential speed of the upper part becomes. higher than that of the lower part, then the feed amount of the upper part becomes larger than that of the lower part, whereby the material M is moved downward and the deviation in the upward direction is corrected. |
