| 摘要 |
PURPOSE: To provide an acceleration sensor which has a good temperature characteristic and can detect acceleration in twoor three-dimensional directions with one chip by forming a plurality of cantilever type acceleration sensors in one chip. CONSTITUTION: The cantilever type acceleration sensors each of which is composed of a fixed section 3, weight 5 which is moved by acceleration, beam section 4 which connects the weight 5 to the section 3, and resistance elements X1-RX4, RY1-RY4, and RZ1-RZ2 arranged on the beam section 4 are arranged crosswise so that the integral bodies of fixed sections 3, beam sections 4, and weight sections 5 can be directed toward the central part. |
