PIEZOELECTRIC SENSOR ELEMENT AND MANUFACTURE THEREOF

摘要

PURPOSE: To provide a monolithic piezoelectric sensor element structure having a small size and high sensitivity and a method for manufacturing the same to realize it. CONSTITUTION: A unimorph type piezoelectric sensor element of a cantilever structure is formed by the steps of forming a lower electrode 2 and a piezoelectric thin film 3 on a substrate, patterning it in a rectangular shape, then scooping out the substrate of the lower part so that the other end is floated in space except one end for supporting the rectangular part to form a recess 4 to be an air gap, further, providing its top with an upper electrode 5 and a support layer 6.