发明名称 PHOTO-ACTIVITY HOLDING METHOD FOR FILM-LIKE PHOTOSENSITIVE MATERIAL AND MANUFACTURE OF PRINTED WIRING BOARD
摘要 PURPOSE: To irradiate a film-like photosensitive material laminated under reduced pressure with good reproducibility and high efficiency with actinic rays by holding the film-like photosensitive material laminated on a base under reduced pressure until the irradiation with the actinic rays and radiating the actinic rays in the chemically inert atmosphere. CONSTITUTION: A film-like photosensitive material laminated on a base under reduced pressure is held until the irradiation with the actinic rays and is irradiated with the actinic rays in chemically inert atmosphere. The atmosphere not hindering the photo- reaction such as the photo-polymerization or photo-cross-linking when the active light is illuminated, e.g. nitrogen gas, may be used for the chemically inactive atmosphere. The decompressed state may be used for this chemically inactive atmosphere, however the atmospheric state is preferable in view of the irregularity following property and adhesiveness of the photosensitive layer on the base. The film-like photosensitive material laminated under decompression is preferably held in the chemically inert atmosphere immediately after lamination because the photo-activity is decreased in response to the period after the photosensitive material is returned to the atmospheric pressure from decompression after lamination.
申请公布号 JPH08160638(A) 申请公布日期 1996.06.21
申请号 JP19940306053 申请日期 1994.12.09
申请人 HITACHI CHEM CO LTD 发明人 TSUCHIYA KATSUNORI;TSUKADA KATSUSHIGE
分类号 G03F7/16;G03F7/26;G03F7/38;H05K3/06;(IPC1-7):G03F7/38 主分类号 G03F7/16
代理机构 代理人
主权项
地址