| 摘要 |
PURPOSE: To obtain a capacitive pressure sensor in which a gap can be formed precisely in a simple process by a method wherein a sealing agent which does not contain a gap formation material in a definite diameter is formed between a diaphragm and a base board. CONSTITUTION: The capacitive pressure sensor comprises a circular diaphragm 11 to which the pressure of a fluid is applied, and a first electrode 13 which is formed to be circular in a plane is formed on its rear surface. A circular base board 12 is installed so as to be opposed to the diaphragm 11 by keeping a definite interval, and a second electrode 14 which is opposed to the electrode 13 is installed on the surface of the board 12. In the diaphragm 11 and the board 12, a sealing agent which does not contain a gap formation material is formed at their peripheral edge parts, the electrode 13 and the electrode 14 are installed so as to face at an interval of, e.g. about 5 to 100μm, and their inside air is set to be in an airtight state. Then, even when the gap between the diaphragm 11 and the board 12 is narrow, the gap can be set precisely by controlling the coating thickness of the sealing agent 15 which does not contain the gap formation material.
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