| 摘要 |
<p>PURPOSE: To easily manufacture a surface conductive electron emission element having the uniform electric characteristic by communicating element electrodes so formed as to be faced to each other on a substrate by means of a conductive thin film, and forming an electron emitting part through a process of adjusting the value of resistance of this conductive thin film. CONSTITUTION: Element electrodes 4, 5 (made of Ni, Cr, etc.) are formed on the substrate 1 (quartz glass) so as to be faced to each other, and a conductive thin film 3 (made of Pd, Ru, etc.) is so formed as to communicate the element electrodes 4, 5 with each other. The substrate 1 on which the element electrodes 4, 5 and the conductive thin film 3 are formed is installed in a vacuum device 42, and a pulse applying device 41 and an ammeter 40 are connected to the element electrodes 4, 5. After the vacuum device 42 is exhausted by an exhaust pipe 43, various kinds of gas are introduced from an introducing pipe 44, the pulse shape is made generated from the pulse applying device 41, and the initial resistance is measured by the ammeter 40. After the resistance correcting pulse is added to adjust the value of resistance into the desired one, the electrification processing called forming is applied, and an electron emitting part 2 whose structure is changed is formed on a part of the conductive thin film 3.</p> |
