| 摘要 |
PURPOSE: To provide a laser plasma source which can effectively prevent adhesion of plasma substances without using a harmful liquid metal and while the substances which are nothing to do with plasma are lessened as much as possible. CONSTITUTION: A laser plasma source generates X-rays from plasma generated by converging laser beams 108 on a target 104. The target 104 is composed of a liquid compound having vapor pressure lower than 0.1Pa. |
