| 摘要 |
<p>PURPOSE: To enhance a stage device in device or wafer processing throughput by a method wherein a Y stage is changed in acceleration depending on the direction in which it is accelerated. CONSTITUTION: The output section 13 of a stage device outputs a power to accelerate a Y stage 5 in a first direction, and an output section 14 outputs a power to accelerate the Y stage in a second direction. A main control system 9 selects either the output section 13 or the output section 14 by a switch 15 in accordance with the direction in which the Y stage 5 is driven to drive a Y axis drive section 10 to accelerate and move the Y stage 5. Next, the power outputted from the output section 13 or the output section 14 is so set as to accelerate the Y stage 5 to such an extent that an X stage 4 is restrained from jumping up from the surface of a V guide 11. As the V guide 11 is located out of the center of gravity of the X stage 4, the upper limit of the acceleration of the Y stage 5 in the first direction is smaller than that in the second direction, and the acceleration of the Y stage 5 is capable of being set relatively higher in the second direction.</p> |
