发明名称 |
METHOD OF PRODUCING A GRADIENT LAYER |
摘要 |
The invention relates to a plasma CVD method for producing a gradient layer wherein the layer gradient is produced in the direction of layer growth by changing at least one plasma power parameter during the coating process. According to the invention, thin gradient layers are generated with high precision by supplying the plasma power in a pulsed manner and adjusting the layer gradient by changing the plasma power parameters of pulse amplitude, pulse duration and/or pulse interval.
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申请公布号 |
CA2165598(A1) |
申请公布日期 |
1996.06.21 |
申请号 |
CA19952165598 |
申请日期 |
1995.12.19 |
申请人 |
SCHOTT GLASWERKE |
发明人 |
OTTO, JUERGEN;SEGNER, JOHANNES;PAQUET, VOLKER |
分类号 |
B32B9/00;C23C16/02;C23C16/40;C23C16/50;C23C16/511;C23C16/515;C23C16/52;G02B1/10;(IPC1-7):C23C16/50 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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