发明名称 BOARD CARRYING DEVICE
摘要 PURPOSE: To provide a device which can reduce carrying space with a simple constitution, and shorten the carrying time by providing first and second moving trucks capable of moving along each of the first and second guide rails extending in the directions crossing each other, and providing one moving truck with a board-supporting means. CONSTITUTION: A board carrying device is equipped with the first rail 5 extending in Y direction along a plurality of cassettes C and the second guide rail 6 extending in X direction along a plurality of board-processing parts from the end of the first guide rail 5. Moreover, this device is equipped with the first moving truck 7, which can move along the first guide rail 5, the second moving truck 8, which can move along the second guide rail 6, and an over-run means 10 for arranging either the first shifting truck 7 or the second moving truck 8 capably of riding-on the other. Furthermore, the second moving truck 8 capable of running on is provided with a board support means RB which supports a board W movably in horizontal and vertical directions, and is provided rotatably around the vertical shaft.
申请公布号 JPH08162515(A) 申请公布日期 1996.06.21
申请号 JP19940303770 申请日期 1994.12.07
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KAMIYAMA TSUTOMU
分类号 B65G49/07;B25J5/02;H01L21/02;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G49/07
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