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发明名称
OXIDE ELEMENT AND MANUFACTURE THEREOF
摘要
申请公布号
JPH08162684(A)
申请公布日期
1996.06.21
申请号
JP19940301813
申请日期
1994.12.06
申请人
HITACHI LTD
发明人
HIRATANI MASAHIKO;IMAGAWA KAZUSHIGE
分类号
H01L39/22;(IPC1-7):H01L39/22
主分类号
H01L39/22
代理机构
代理人
主权项
地址
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