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经营范围
发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPH08162056(A)
申请公布日期
1996.06.21
申请号
JP19940298171
申请日期
1994.12.01
申请人
HITACHI LTD
发明人
ISAGOZAWA SHIGETO
分类号
H01J37/141;H01J37/147;(IPC1-7):H01J37/147
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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