Planetary gearing for moving substrates on planetary tracks in vacuum coating plants

摘要

The ends of the planetary shafts (5) are each connected to the outer ring of the radial bearing (7) and are supported additionally at a certain spacing by two radial bearings (8) and the support disc (3). This disc rotates with the speed of the central spur wheel (4) and has the pitch diameter thereof.The planetary shafts are thin-walled hollow shafts made from a poor heat-conducting material. The support disc is water cooled and consists of a material with good heat conductivity.