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发明名称
Verfahren zur Herstellung von Vielschicht-Keramiksubstraten mittels Mikrowellenheizung
摘要
申请公布号
DE69210750(D1)
申请公布日期
1996.06.20
申请号
DE19926010750
申请日期
1992.10.02
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
LEWIS, DAVID ANDREW, CARMEL, NY 10512, US;SHAW, JANE MARGARET, RIDGEFIELD, CT 06877, US
分类号
H05K3/46;C04B35/638;(IPC1-7):C04B35/64;B32B18/00;C03C8/14;C03C14/00;H01L21/48
主分类号
H05K3/46
代理机构
代理人
主权项
地址
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