| 摘要 |
PURPOSE: To provide an inductor which allows its inductance value to be varied and can be contained in a semiconductor integrated circuit and provide a semiconductor integrated circuit best suited to microwave integrated circuits. CONSTITUTION: A loop-like interconnection layers 4-1 to 4-4 having open ends at a lower part of a spiral inductor 1, field effect transistors Q1-Q4 serving as switches for turning on and off the open ends, and insulation film between the inductor 1 and interconnection layers 4-1 to 4-4 are provided to vary the inductance value by the switches Q1-Q4. Thus, the inductance value can be varied and they can be contained in a semiconductor integrated circuit and incorporated in a microwave integrated circuit. |
