TEMPERATURE SENSOR SYSTEM USING THIN FILM OF MICROCRYSTALLINE SEMICONDUCTOR

摘要

A temperature sensor for precision temperature measurement in a magnetic field over a broad temperature range, which can minimize the error between the value obtained from an approximate expression and an actual measurement value by correcting the temperature coefficient of resistance of the temperature sensor. The temperature sensor has a cylindrical structure comprising a thin film (2) of microcrystalline semiconductor disposed on an insulating substrate, a temperature-sensitive element (3) comprising four electrodes connected to the thin film, a cylindrical container (4) made of a non-magnetic metal which confines the temperature-sensitive element with a helium gas, and four conductors (5) connected to the electrodes of the temperature-sensitive element and passed through a bottom seal of the container. The microcrystalline semiconductor preferably comprises an n-type silicon-germanium compound of a conductivity of 0.1-50 S/cm with a silicon content greater than 50 and less than 100 %.