发明名称 |
Reversing orientation of sputtering screen to avoid contamination |
摘要 |
A sputtering apparatus deposits a layer of material on a substrate. The apparatus includes a screening member, such as a plate collimator or a tube collimator, located between the target and substrate. A motor drive reverses the respective positions of the two opposite sides of the screening device which respectively face the substrate and the target. |
申请公布号 |
EP0717431(A1) |
申请公布日期 |
1996.06.19 |
申请号 |
EP19950118430 |
申请日期 |
1995.11.23 |
申请人 |
APPLIED MATERIALS INC. |
发明人 |
FORSTER, JOHN;VAN GOGH, JAMES S.;TEPMAN, AVI |
分类号 |
C23C14/34;C23C14/56;H01J37/34;H01L21/203 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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