发明名称 Ashing furnace and method
摘要 <p>A furnace comprises an enclosure (12), a hearth plate (40) within the enclosure for supporting combustible material, a first heater element (46) adjacent the hearth plate (40) for initial combustion of the combustible material, a filter (52,54) disposed above the hearth plate for filtering uncombusted products of combustion of the combustible material, and a second heater element (8) adjacent the filter for final combustion of the uncombusted products of combustion filtered by the filter. A controller (19) controls the first and second heater elements independently. &lt;IMAGE&gt;</p>
申请公布号 EP0717250(A1) 申请公布日期 1996.06.19
申请号 EP19950309135 申请日期 1995.12.14
申请人 BARNSTEAD THERMOLYNE CORPORATION 发明人 PEAKE, STEVEN C.
分类号 F23G5/10;F23G5/14;F27B17/00;(IPC1-7):F27B17/00;F23G7/06 主分类号 F23G5/10
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