发明名称 |
Method and apparatus for automated docking of a test head to a device handler |
摘要 |
<p>A positioner facilitates docking and undocking of an electronic test head with a device handler. The positioner provides for rotation of the test head about a first axis. The positioner includes a linkage arm structure for moving the test head along a second axis orthogonal to the first axis. Using motors, sensors and a processor, the linkage arm structure accurately docks the electronic test head with the device handler. <IMAGE></p> |
申请公布号 |
EP0716905(A2) |
申请公布日期 |
1996.06.19 |
申请号 |
EP19950308206 |
申请日期 |
1995.11.16 |
申请人 |
INTEST CORPORATION |
发明人 |
GRAHAM, DANIEL J.;HOLT, ALYN R.;MATTHIESSEN, ROBERT E.;WEILERSTEIN, I MARVIN.;WEST, CHRISTOPHER L |
分类号 |
H01L21/66;G01R31/26;B25J9/16;G01R1/04;G01R1/067;G01R31/28;H01L21/68;(IPC1-7):B25J9/16 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|