Sample vessel for X-ray microscopes

摘要

A sample vessel for X-ray microscopes comprising a first silicon base plate having an entrance window covered with a thin film of silicon nitride, and a second silicon base plate which has an exit window covered with a thin film of silicon nitride and matched with the entrance window. The second silicon base plate being connected the first base plate by way of a spacer so as to form a sealed space capable of accommodating samples to be observed. Disposed in the space is a mesh member made of a wire material having an angle of contact with water smaller than 90 DEG at a location adjacent to the thin film of silicon nitride covering the entrance window or a thin film of aluminium is evaporation-coated over the thin film of silicon nitride. This sample vessel makes it possible to enhance mechanical strength of the thin film of silicon nitride and limits shifting of samples within very narrow ranges with water films formed in meshes of the mesh member, thereby remarkably facilitating observation of the samples with X-rays and soft X-rays.