发明名称 CUTTING DEVICE TO CORRECT ERROR DUE TO HEAT CHANGE
摘要 <p>PURPOSE: To correct the thermal deformation of a spindle unit or the like without using a constant temperature water controller by recording the data on the expansion/contraction per unit temperature of a member in the CPU, and correcting the expansion/contraction error of the member attributable to the temperature change based on the information from a temperature sensor and the data. CONSTITUTION: A temperature sensor 13 is fitted in the vicinity of a Z-axis linear scale 5 at a base 6 which is likely to be affected by the measurement error due to the temperature change, measures the temperature information at the prescribed time intervals, and inputs the detected signal to the CPU, and records it in the temperature memory M2 . The data in this temperature memory M2 are compared with the data in the temperature memory M1 where the immediately previous temperature is recorded. If M1 =M2 , there is no temperature change, and no correction is made, while a spindle unit 1 is corrected to be lowered in the Z-axis direction to correct the error due to the thermal change if M1 <-M2 . This correction is achieved by inputting the command signal from the CPU to a drive controller 14.</p>
申请公布号 JPH08155790(A) 申请公布日期 1996.06.18
申请号 JP19940330183 申请日期 1994.12.06
申请人 DISCO ABRASIVE SYST LTD 发明人 INABA KAZUNORI
分类号 B23Q15/18;B28D5/02;H01L21/301;(IPC1-7):B23Q15/18 主分类号 B23Q15/18
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