发明名称 |
Method for annealing thin film superconductors |
摘要 |
There is disclosed a method for annealing oxide thin film superconductors having layered structures including at least Cu-O layers in which each oxide thin film superconductor is heated partially by a heating means and the heating portion is moved at a predetermined speed.
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申请公布号 |
US5527767(A) |
申请公布日期 |
1996.06.18 |
申请号 |
US19940238339 |
申请日期 |
1994.05.05 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SETSUNE, KENTARO;WASA, KIYOTAKA;ICHIKAWA, YOU |
分类号 |
H01L39/24;(IPC1-7):H01L39/24;B05D3/06 |
主分类号 |
H01L39/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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