发明名称 Method for annealing thin film superconductors
摘要 There is disclosed a method for annealing oxide thin film superconductors having layered structures including at least Cu-O layers in which each oxide thin film superconductor is heated partially by a heating means and the heating portion is moved at a predetermined speed.
申请公布号 US5527767(A) 申请公布日期 1996.06.18
申请号 US19940238339 申请日期 1994.05.05
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 SETSUNE, KENTARO;WASA, KIYOTAKA;ICHIKAWA, YOU
分类号 H01L39/24;(IPC1-7):H01L39/24;B05D3/06 主分类号 H01L39/24
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