| 摘要 |
PURPOSE: To obtain a rigid carbon film excellent in hardness, wear resistance, easy in grinding and low in coefficient of friction by consisting it of diamond and amorphous carbon and specifying the peak intensity of Raman spectroscopic spectrum and the crystal size. CONSTITUTION: In the rigid carbon film consisting at least of diamond and amorphous carbon, the intensity ratio H1 /H2 of the peak intensity H1 present in 1160±40cm<-1> by Raman spectroscopic analysis to the highest peak intensity H2 present in 1350±40cm<-1> is controlled to 0.02-1, preferably 0.15-0.5. Further, average crystal diameter is controlled to <=3μm, preferably <=2μm. The surface roughness of the film is preferably <=2μm in Rmax and, as a result, the grinding time is decreased. The rigid carbon film is formed, for example, by electronic cyclotron resonance plasma CVD method and, at this time, the above properties are attained by adequately controlling the temp., pressure, reaction gas concn., etc., of the base material at the time of film forming.
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