发明名称 |
Non-aminic photoresist adhesion promoters for microelectronic applications |
摘要 |
A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7. |
申请公布号 |
AU4283196(A) |
申请公布日期 |
1996.06.17 |
申请号 |
AU19960042831 |
申请日期 |
1995.11.14 |
申请人 |
COMPLEX FLUID SYSTEMS, INC. |
发明人 |
WILLIAM R PETERSON;CRAIG M STAUFFER |
分类号 |
G03F7/075;G03F7/085;G03F7/38;H01L21/027;H01L21/312 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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