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发明名称
HALBLEITERWAFER TRANSPORT-MODUL MIT DREHBAREM UND HORIZONTAL AUSZIEHBAREM HALTER
摘要
申请公布号
DE69302586(D1)
申请公布日期
1996.06.13
申请号
DE1993602586
申请日期
1993.12.16
申请人
MATERIALS RESEARCH CORP., ORANGEBURG, N.Y., US
发明人
HODOS, JULIAN, HOWARD BEACH, NY 11414, US
分类号
B23Q7/02;B23Q7/00;B65G49/07;H01L21/677;(IPC1-7):H01L21/00
主分类号
B23Q7/02
代理机构
代理人
主权项
地址
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