| 摘要 |
Vaporiser boat comprises a layered structure made of: (i) a layer of high melting boride, carbide or nitride of gp. IVb, Vb or VIb elements, or a stable mixed phase of these cpds., or a stable mixed phase of these cpds. with Al3N4; (ii) a layer of the corresponding metal as intermediate layer; and/or (iii) an insulating layer of high melting oxide, on a metallic carrier.
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| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE |
发明人 |
ANTON, BERNHARD, DIPL.-CHEM., 07743 JENA, DE;STOECKL, WIELAND, DIPL.-ING., 07749 JENA, DE;KAISER, NORBERT, DR.RER.NAT., 07745 JENA, DE |
