Pulsed laser photoemission electron-beam probe,申请号EP19910202756-传众专利搜索

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发明名称	Pulsed laser photoemission electron-beam probe
摘要
申请公布号	EP0492677(B1)	申请公布日期	1996.06.12
申请号	EP19910202756	申请日期	1991.10.24
申请人	SCHLUMBERGER TECHNOLOGIES, INC.	发明人	RICHARDSON, NEIL;WILSHER, KENNETH R.
分类号	G01R31/302;G01R31/305;G01R31/319;H01L21/66;(IPC1-7):G01R31/307;G01R31/311	主分类号	G01R31/302
代理机构		代理人
主权项
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