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发明名称
CONNECTING HOLE, CONNECTING HOLE-FORMING METHOD AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08153790(A)
申请公布日期
1996.06.11
申请号
JP19940296272
申请日期
1994.11.30
申请人
SONY CORP
发明人
TAKIZAWA MASAAKI
分类号
H01L21/28;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
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