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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH08153731(A)
申请公布日期
1996.06.11
申请号
JP19940294856
申请日期
1994.11.29
申请人
NEC YAMAGATA LTD
发明人
URASHIMA MANABU
分类号
H01L21/28;H01L21/265;H01L21/318;H01L21/331;H01L29/73;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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