| 摘要 |
PURPOSE: To obtain a high-precision X-ray mirror which is excellent in heat radiation because a smooth film has a high heat conductivity and whose surface can be ground extremely smooth. CONSTITUTION: In the X-ray mirror equipped with a smooth film 2 and a reflective film 3 on the surface of a ceramic substrate 1, the smooth film 2 is made of diamond. At the same time, the thickness of it 2 is 5 to 10μm and the average diameter of a secondary crystal particle is 10μm or less in forming the film. |
