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经营范围
发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH08153780(A)
申请公布日期
1996.06.11
申请号
JP19950124399
申请日期
1995.04.24
申请人
MITSUBISHI MATERIALS SHILICON CORP;MITSUBISHI MATERIALS CORP
发明人
SAKAI SHINSUKE
分类号
H01L21/762;H01L21/02;H01L21/304;H01L21/76;H01L27/12;(IPC1-7):H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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